Research Topics Micro actuators and Sensors
Research Area/ Research Interest: Micro actuators and Sensors in Electrical Engineering
Research Paper Topics for: Masters and PhD Thesis and publication
- Micro mechatronics and micro actuators
- Studies of micro actuators in Japan
- Micro actuators and their applications
- Stimulus-responsive gels: Promising materials for the construction of micro actuators and sensors
- Microactuators and micromachines
- Future of actuators and microsystems
- Magnetic micro-actuators and systems (MAGMAS)
- Special issue on integrated sensors, microactuators, and microsystems (MEMS)
- Modelization and characterization of asymmetrical thermal micro-actuators
- Nanofiber-reinforced soft fluidic micro-actuators
- Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
- PCB-integrated metallic thermal micro-actuators
- Levitating micro-actuators: a review
- Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3D micro actuators and sensors
- MEMS actuators and sensors: observations on their performance and selection for purpose
- Micro structures and micro actuators for implementing sub-millimeter robots
- Flexible pneumatic micro-actuators: analysis and production
- Wireless bimorph micro-actuators by pulsed laser heating
- Optimal design of micro-actuators based on SMA wires
- Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method
- A new basic technology for magnetic micro-actuators
- Novel magnetic micro-actuators and systems (MAGMAS) using permanent magnets
- Micro-actuators for high density disk drives
- Single crystal silicon micro-actuators
- New materials for micro-scale sensors and actuators: An engineering review
- Working equations for piezoelectric actuators and sensors
- Microactuators and their technologies
- Microactuators for microrobots: a critical survey
- Model of the attachment/detachment cycle of electrostatic micro actuators
- Towards fully polymeric electroactive micro actuators with conductive polymer electrodes
- Static/dynamic trade-off performance of PZT thick film micro-actuators
- Simulation and experiment investigation on structural design and reinforcement of pyrotechnical sliding micro-actuators
- Thermally excited silicon microactuators
- Flexible temperature sensor integrated with soft pneumatic microactuators for functional microfingers
- Microfabrication of PPy microactuators and other conjugated polymer devices
- Laminated piezopolymer plates for torsion and bending sensors and actuators
- Position control of parallel-plate microactuators for probe-based data storage
- Dynamic modelling for thermal micro-actuators using thermal networks
- Pneumatic and hydraulic microactuators: a review
- Polypyrrole micro actuators
- Microactuators: electrical, magnetic, thermal, optical, mechanical, chemical and smart structures
- Analytical closed-form solutions for size-dependent static pull-in behavior in electrostatic micro-actuators via Fredholm integral equation
- Surface micromachining for microsensors and microactuators
- Design considerations for micromachined electric actuators
- Adomian decomposition method used for solving nonlinear pull-in behavior in electrostatic micro-actuators
- Bent-beam electro-thermal actuators for high force applications
- CAD challenges for microsensors, microactuators, and microsystems
- Microfabricated actuators and their application to optics
- Modeling and optimal design of piezoelectric cantilever microactuators
- Large-strain, piezoelectric, in-plane micro-actuator
- A highly aromatic and sulfonated ionomer for high elastic modulus ionic polymer membrane micro-actuators
- Photostrictive actuators
- Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators
- Fabrication of silicon-based shape memory alloy micro-actuators
- Capacitive long-range position sensor for microactuators
- Study on flexible large-area Poly (vinylidene fluoride)-based piezoelectric films prepared by extrusion-casting process for sensors and microactuators
- Conducting polymer microactuators operating in air
- Thin film shape memory alloy microactuators
- A Composite Hysteresis Model in Self-Sensing Feedback Control of Fully Integrated Microactuators
- Demonstration and characterization of PZT thin-film sensors and actuators for meso-and micro-structures
- Microactuators toward microvalves for responsive controlled drug delivery
- Piezoelectric MEMS sensors: state-of-the-art and perspectives
- Carbon nanotube-reinforced composites as structural materials for microactuators in microelectromechanical systems
- Electrostriction of polymer films for microactuators
- Photopatterning of thermally sensitive hydrogels useful for microactuators
- Reliability evaluation of piezoelectric micro-actuators with application in hard disk drives
- Aspects of fabrication and characterization of electro-thermal micro-actuators
- Corrugated PVDF bimorphs as tactile sensors and micro-actuators–A research note
- Magnetic shape memory microactuators
- Micro-electromechanical systems: Motion control of micro-actuators
- … (3, 4‐ethylenedioxythiophene): Poly (styrene sulfonate)/Polyethylene Oxide Electrodes with Improved Electrical and Electrochemical Properties for Soft Microactuators …
- Electrostatically driven linear micro-actuators: FE analysis and fabrication
- Attachment/detachment electrostatic micro actuators for pan-tilt drive of a micro CCD camera
- Micro-actuators for control of delta wing with sharp leading edge
- Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators
- Material and performance characterization of Z-shaped nickel electrothermal micro-actuators
- Adaptive control of electrostatic microactuators with bidirectional drive
- A two-beam method for extending the working range of electrostatic parallel-plate micro-actuators
- Micro actuators on the basis of thin SMA foils
- Strain energy density of VO2-based microactuators
- Spiral type magnetic micro actuators for medical applications
- High Performance Micro Actuators for Tactile Displays
- Shape memory microactuators
- Integrating conjugated polymer microactuators with CMOS sensing circuitry for studying living cells
- Precision Sensors, actuators and systems
- High stroke and high deflection bulk-PZT diaphragm and cantilever micro actuators and effect of pre-stress on device performance
- Review of electrothermal actuators and applications
- Ferroelectric thin films for micro-sensors and actuators: a review
- Magnetic microactuators based on polymer magnets
- Adhesive wafer bonding of micro-actuators with SU-8 photoresist
- Interaction mechanics between embedded micro-actuators and the surrounding host in smart structures
- Optimized gradient-free PZT thin films for micro-actuators
- Scale effects and thermal considerations for micro-actuators
- Arrays of EAP micro-actuators for single-cell stretching applications
- Control experiments on two SMA based micro-actuators
- Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point
- Patterning and electrical interfacing of individually controllable conducting polymer microactuators
- Estimation of the mechanical stiffness constant of MEMS-based parallel-plate micro-actuators
- Analysis and optimization of loaded cantilever beam microactuators
- Micro-actuators: When artificial muscles made of nematic liquid crystal elastomers meet soft lithography
- The case for magnetically driven microactuators
- Thermo-mechanical and photo-luminescence properties of micro-actuators made of liquid crystal elastomers with cyano-oligo (p-phenylene vinylene) crosslinking …
- Finite element modeling of piezoelectric sensors and actuators
- Shape memory alloy micro-actuators for medical applications
- Graphene-based bimorph microactuators
- Ferroelectric thin films in micro-electromechanical systems applications
- Microfabricating conjugated polymer actuators
- Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes
- Demonstrating kHz frequency actuation for conducting polymer microactuators
- Actuators for micropositioners and nanopositioners
- Theoretical and experimental analysis of pneumatic balloon microactuators
- A review of the hybrid techniques for the fabrication of hard magnetic microactuators based on bonded magnetic powders
- Microfabrication techniques for integrated sensors and microsystems
- Surface-micromachined free-space fiber optic switches with integrated microactuators for optical fiber communication systems
- Fabrication and control of miniature McKibben actuators
- Modeling and bonding-free fabrication of flexible fluidic microactuators with a bending motion
- Photocontrol of fluid slugs in liquid crystal polymer microactuators
- Transfer bonding technology for batch fabrication of SMA microactuators
- Microactuators for aligning optical fibers
- Effect of electrolyte storage layer on performance of PPy-PVDF-PPy microactuators
- Manufacture of micro-sensors and actuators for flow control
- Modeling and design of variable-geometry electrostatic microactuators
- New opportunities for microactuators
- Characterization and modeling of PPy bilayer microactuators: Part 1. Curvature
- … techniques and applications design methods,(2) Fabrication techniques,(3) manufacturing methods,(4) Sensors and actuators,(5) Medical applications and …
- Fluidic self-assembly of micromirrors onto microactuators using capillary forces
- Electromagnetic linear actuators with inductive position sensing
- Development of a flexible microfluidic system integrating magnetic micro-actuators for trapping biological species
- Compliant thermal microactuators
- Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices
- Fatigue analysis of U‐shaped flexural electro‐thermal micro‐actuators
- 3D printing microactuators for soft microrobots
- Linear thermomechanical microactuators
- Ferromagnetic shape memory microactuators
- Applications of silicon microactuators based on bimorph structures
- Scaling laws of microactuators and potential applications of electroactive polymers in MEMS
- Electroplated soft magnetic materials for microsensors and microactuators
- Fabrication and operation of polyimide bimorph actuators for a ciliary motion system
- Next generation actuators leading breakthroughs
- Array-driven ultrasonic microactuators
- Saved to My library
- Frequency-controlled wireless shape-memory-alloy microactuators integrated using an electroplating bonding process
- A survey of micro-actuator technologies for future spacecraft missions
- A conveyance system using air flow based on the concept of distributed micro motion systems
- Design and implementation of electrostatic micro-actuators in ultrasonic frequency on a flexible substrate, PEN (polyethylene naphthalate)
- Flash evaporation of TiNi shape memory thin film for microactuators
- A flexible electro-rheological microvalve (FERV) based on SU-8 cantilever structures and its application to microactuators
- SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators
- Thermal microactuators for surface-micromachining processes
- Effects of residual stresses on lead–zirconate–titanate (PZT) thin-film membrane microactuators
- Thermo-mechanical characterization of optical thin films filters deposited onto shape memory alloy micro-actuators
- A simple approach to characterizing the driving force of polysilicon laterally driven thermal microactuators
- Low temperature crystallised Ti-rich NiTi shape memory alloy films for microactuators
- Vertical comb array microactuators
- A review on MEMS based micro displacement amplification mechanisms
- The use of sputtered ZnO piezoelectric thin films as broad-band microactuators
- Design and pressure analysis for bulk-micromachined electrothermal hydraulic microactuators using a PCM
- Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators
- Modeling and design of novel photo-thermo-mechanical microactuators
- Photothermal properties of shape memory polymer micro‐actuators for treating stroke
- Stimulus-sensitive hydrogels and their applications in chemical (micro) analysis
- A simple approach to characterizing the driving force of polysilicon laterally driven thermal microactuators
- Low temperature crystallised Ti-rich NiTi shape memory alloy films for microactuators
- Vertical comb array microactuators
- A review on MEMS based micro displacement amplification mechanisms
- The use of sputtered ZnO piezoelectric thin films as broad-band microactuators
- Design and pressure analysis for bulk-micromachined electrothermal hydraulic microactuators using a PCM
- Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators
- Modeling and design of novel photo-thermo-mechanical microactuators
- Photothermal properties of shape memory polymer micro‐actuators for treating stroke
- Stimulus-sensitive hydrogels and their applications in chemical (micro) analysis
- Simulation, measurement, and asymmetric buckling of thermal microactuators
- Design, fabrication and testing of piezoelectric polymer PVDF microactuators
- Analytical and finite element model pull-in study of rigid and deformable electrostatic microactuators
- Long-travel electrothermally driven resonant cantilever microactuators
- Fully batch fabricated magnetic microactuators using a two layer LIGA process
- Micro/miniature shape memory alloy actuator
- A two-dimensional probability model for evaluating reliability of piezoelectric micro-actuators
- Micro ICPF actuators for aqueous sensing and manipulation
- Multi-pole magnetization of NdFeB magnets for magnetic micro-actuators and its characterization with a magnetic field mapping device
- Single-crystal silicon actuator arrays for micro manipulation tasks
- Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology
- Materials selection in mechanical design for microsensors and microactuators
- Displacement amplification of piezoelectric microactuators with a micromachined leverage unit
- Macro-modeling for polysilicon cascaded bent beam electrothermal microactuators
- Design, fabrication and characterization of electrostatic micro actuators for microfluidic platforms
- Pushing the limits for microactuators based on electroactive polymers
- Linear microactuators based on the shape memory effect
- CMOS electrothermal microactuators
- Evaluation of energy dissipation mechanisms in vibrational microactuators
- Analysis of tip deflection and force of a bimetallic cantilever microactuator
- Design of multiphysics actuators using topology optimization–Part I: One-material structures
- Phase change materials in microactuators: basics, applications and perspectives
- Recent progress in micromachining and applications to microactuators
- Soft, flexible micromanipulators comprising polypyrrole trilayer microactuators
- An energy-based design criterion for magnetic microactuators
- Silicon-microactuators: Activation mechanisms and scaling problems
- Folding assembly of micro-actuators
- Residual stress-loaded titanium–nickel shape-memory alloy thin-film micro-actuators
- Introduction to sensors and actuators
- Dynamic modelling and analysis of V-and Z-shaped electrothermal microactuators
- Damping characteristics of beam-shaped micro-oscillators
- Microfluidic-integrated laser-controlled microactuators with on-chip microscopy imaging functionality
- MEMS microgripper actuators and sensors: The state-of-the-art survey
- Electromagnetic microactuators with multiple degrees of freedom
- Pyrotechnic actuator: a new generation of Si integrated actuator
- Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
- Photostrictive actuators-New perspective
- Sensors and actuators on non-planar substrates
- In situ electrostatic microactuators for measuring the Young’s modulus of CMOS thin films
- An earthworm-like micro robot using shape memory alloy actuator
- Potential applications of electroactive polymer sensors and actuators in MEMS technologies
- Modelling considerations for electrostatic forces in electrostatic microactuators
- Solution of nonlinear pull-in behavior in electrostatic micro-actuators by using He’s homotopy perturbation method
- Microelectromechanical systems based on ferroelectric thin films
- Mechanical stimulation of epithelial cells using polypyrrole microactuators
- Polymer MEMS actuators for underwater micromanipulation
- Electroactive polymer actuators and devices
- Materials development for thin film actuators
- Thermal cycle modeling of electrothermal microactuators
- Application of MEMS technology in automotive sensors and actuators
- Arrays of thermal microactuators coupled to micro-optical components
- Thermal analysis for bulk-micromachined electrothermal hydraulic microactuators using a phase change material
- Direct laser writing of four-dimensional structural color microactuators using a photonic photoresist
- Finite element analysis of laminated composite structures containing distributed piezoelectric actuators and sensors
- Enhancing displacement of lead–zirconate–titanate (PZT) thin-film membrane microactuators via a dual electrode design
- Microactuators with moving magnets for linear, torsional or multiaxial motion
- Bi-directional electrothermal electromagnetic actuators
- Design of very small electromagnetic and electrostatic micro actuators
- A novel method of manufacturing three-dimensional ionic polymer–metal composites (IPMCs) biomimetic sensors, actuators and artificial muscles
- Piezoelectric actuators 2006
- Analysis of the dynamics in microactuators using high-speed cine photomicrography
- Smart materials, precision sensors/actuators, smart structures, and structronic systems
- Critical review of current trends in shape memory alloy actuators for intelligent robots
- Hydrogel-Based Microactuators with Remote-Controlled Locomotion and Fast Pb2+-Response for Micromanipulation
- Silicon micromachining for microsensors and microactuators
- Microsensors and microactuators using ferroelectric thin films
- Anti-biofouling implantable catheter using thin-film magnetic microactuators
- Microrobots for micrometer-size objects in aqueous media: potential tools for single-cell manipulation
- A fabrication technology for epitaxial Ni-Mn-Ga microactuators
- Lateral in-plane displacement microactuators with combined thermal and electrostatic drive
- Characteristic modes of electrostatic comb-drive XY microactuators
- Thermal bubble powered microactuators
- Development of a shape-memory-alloy micromanipulator based on integrated bimorph microactuators
- Local analysis of co-dimension-one and co-dimension-two grazing bifurcations in impact microactuators
- Mechanical properties identification and design optimization of nitinol shape memory alloy microactuators
- Solid-phase conductive fuels for chemical microactuators
- Design and characterization of in-plane piezoelectric microactuators
- A decade of MEMS and its future
- Piezoelectric properties and poling effect of thick films prepared for microactuators by aerosol deposition
- Micro actuators by making use of jet flows due to electro-conjugate fluid
- Dynamic characteristics of a hydraulic amplification mechanism for large displacement actuators systems
- Fabrication and test of a micro electromagnetic actuator
- Microactuators using R-phase transformation of sputter-deposited Ti-47.3 Ni shape memory alloy thin films
- The preparation of piezoceramic–polymer thick films and their application as micromechanical actuators
- Dynamic Braille display utilizing phase-change microactuators
- Optical nano and micro actuator technology
- MEMS reconfigurable Vee antenna
- Displacement sensing of a micro-electro-thermal actuator using a monolithically integrated thermal sensor
- Introduction to micromechanisms and microactuators
- Smart materials-based actuators at the micro/nano-scale
- CMOS/BiCMOS self assembling and electrothermal microactuators for tunable capacitors, gapclosing structures and latch mechanisms
- Thin film zinc oxide microsensors and microactuators.
- Integrated cell-based sensors and cell clinics utilizing conjugated polymer actuators
- Parallel-coupled micro-macro actuators
- Multiple depth, single crystal silicon microactuators for large displacement fabricated by deep reactive ion etching
- Piezoelectric microactuators in polymer-composite technology
- Batch-fabricated ferromagnetic microactuators with silicon flexures
- Sensorless manipulation using massively parallel microfabricated actuator arrays
- Analysis of out-of-plane thermal microactuators
- Computing the pull-in voltage of fixed–fixed micro-actuators by artificial neural network
- A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication
- Size-dependent electro-thermo-mechanical analysis of multilayer cantilever microactuators by Joule heating using the modified couple stress theory
- Thin film shape memory alloys and microactuators
- Shape memory alloy microactuators
- Electromagnetic linear actuators with inductive position sensing for micro relay, micro valve and precision positioning applications
- Mechanical programming of soft actuators by varying fiber angle
- Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation
- Temperature control in thermal microactuators with applications to in-situ nanomechanical testing
- Fabrication of piezoelectric thick-film bimorph micro-actuators from bulk ceramics using batch-scale methods
- Development of stimulus-sensitive hydrogels suitable for actuators and sensors in microanalytical devices
- Conducting polymer electromechanical actuators
- Superparamagnetic photosensitive polymer nanocomposite for microactuators
- A lobster-sniffing-inspired method for micro-objects manipulation using electrostatic micro-actuators
- A hysteresis-compensated self-sensing scheme for vanadium dioxide-coated microactuators
- Leading-edge Vortices Control on a Delta Wing by Micromachined Sensors and Actuators
- Micro bellow actuators
- Superparamagnetic twist‐type actuators with shape‐independent magnetic properties and surface functionalization for advanced biomedical applications
- Microactuators fabricated by the LIGA process
- A comparison model of V-and Z-shaped electrothermal microactuators
- E-beam evaporated polysilicon for lead zirconate titanate-based micro-actuators
- Submicron-sized actuators based on enhanced shape memory composite material fabricated by FIB-CVD
- Optimal energy density piezoelectric bending actuators
- Microactuators of free-standing TiNiCu films
- The potentiality of composite elastic magnets as novel materials for sensors and actuators
- Gas-lubricated microbearings for microactuators
- Implementing resonant enhanced pulsed micro-actuators for the control of supersonic impinging jets
- Fabrication of a peristaltic micro pump with novel cascaded actuators
- Closed-form modelling and design analysis of V-and Z-shaped electrothermal microactuators
- Magnetically modified soft micro actuators for oocyte manipulation
- Modeling and design of microjet actuators
