Research Area: Micro Electromechanical System(MEMS)
- A fast estimation of the frequency property of the microelectromechanical system oscillator
- A Variational Principle for a Nonlinear Oscillator Arising in the Microelectromechanical System
- A fractal micro-electromechanical system and its pull-in stability
- Nonlinear dynamics of resonant microelectromechanical system (mems): a review
- Bulk calibration method of micro-electromechanical system (MEMS) microphones
- Li-He’s modified homotopy perturbation method for doubly-clamped electrically actuated microbeams-based microelectromechanical system
- Application of the energy balance method to a nonlinear oscillator arising in the microelectromechanical system (MEMS)
- Fractal pull-in stability theory for microelectromechanical systems
- Review on pressure sensors: a perspective from mechanical to micro-electro-mechanical systems
- In vivo endoscopic optical coherence tomography by use of a rotational microelectromechanical system probe
- Review of flexible microelectromechanical system sensors and devices
- Silicon photonic microelectromechanical phase shifters for scalable programmable photonics
- Topological microelectromechanical systems
- Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 μm Process
- A high-sensitivity MEMS gravimeter without a vacuum chamber
- Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing
- Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System
- Design, simulation and analysis of micro electro‐mechanical system microneedle for micropump in drug delivery systems
- Microelectromechanical System Measurement of Platelet Contraction: Direct Interrogation of Myosin Light Chain Phosphorylation
- Study on the integration of vibration/pressure/magnetic field sensor based on nanofiber film and micro-electro-mechanical system technology
- Investigation of Various Commonly Associated Imperfections in Radiofrequency Micro-Electro-Mechanical System Devices and its Empirical Modeling
- A fast boundary-finite element approach for estimating anchor losses in Micro-Electro-Mechanical System resonators
- An integrated micro electro mechanical system–based silicon wet etching process and nano carbon materials used for improving micro direct methanol fuel cells …
- Micro-electromechanical system based optimized steering angle estimation mechanism for customized self-driving vehicles
- Improved Si-Si Waferbonding as a Step Toward Lighter, More Accurate Microelectromechanical System (MEMS) Gyroscopic Sensors
- Influence of the Different Design of Inertial Mass Suspensions on the Properties of a Microelectromechanical System (MEMS) Sensitive Element
- Design and Demonstration of Micro-Electromechanical Resonator-Based Multipliers
- Quartz‐Based Cantilevers: Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System (Adv. Mater. Technol. 3/2021)
- Asymptotic properties of quenching for the quasilinear electrostatic micro-electro-mechanical system
- Optimal calibration plan for inertial measurement unit based on microelectromechanical system
- Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process
- Using Different Approximations of Averaging Method in Theory of Micro Electromechanical Systems (MEMS)
- Innovative and Robust Application of Automation for Unit Level Traceability on Dual Die configuration of Micro Electromechanical System Products
- Design and characterization of an aluminum nitride-Based MEMS hydrophone with biologically honeycomb architecture
- Micro-Opto-Electro-Mechanical System Accelerometer Based on Coarse-Fine Processing of Fabry–Perot Interferometer Signals
- Optical microelectromechanical systems technologies for spectrally adaptive sensing and imaging
- Micro-electromechanical-system-tuned resonant filters spanning the 8–12 µm band
- A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications
- MEMS Directional Acoustic Sensors
- A deep learned fuzzy control for inertial sensing: Micro electro mechanical systems
- Evaluation of a Micro-Electro Mechanical Systems Spectral Sensor for Soil Properties Estimation. Land 2021, 10, 63
- Nonsingular terminal sliding mode control for micro-electro-mechanical gyroscope based on disturbance observer: Linear matrix inequality approach
- Micro-electromechanical systems technology to improve the performance of various industries: a study
- Micro-electromechanical systems-based technologies for leak detection and localization in water supply networks: a bibliometric and systematic review
- Nonparametric identification of a micro-electromechanical resonator
- A Temperature-Stable and Low Impedance Piezoelectric MEMS Resonator for Drop-in Replacement of Quartz Crystals
- Beam power scale-up in micro-electromechanical systems based multi-beam ion accelerators
- A study on improved methods in Micro-electromechanical systems technology
- A new type-3 fuzzy predictive controller for MEMS gyroscopes
- Fractal N/MEMS: from pull-in instability to pull-in stability
- A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization. Micromachines 2021, 12, 82
- Contact-Free MEMS Devices for Reliable and Low-Power Logic Operations
- Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature
- Gas chromatography based on micro electro mechanical systems (MEMS) for in situ molecular analysis of planetary environments
- 10 MHz Length-Extension Mode Quartz MEMS Resonator For Frequency and Time Applications
- MEMS-INS Based Indoor Pedestrian Localization Using Three-Dimensional Map Matching Algorithm
- Dynamic piezoelectric MEMS-based optical metasurfaces
- GaAs-based microelectromechanical terahertz bolometers fabricated on high-resistivity Si substrates using wafer bonding technique
- Development of A Z-Axis Out of Plane MEMS Accelerometer
- Controllable multichannel acousto-optic modulator and frequency synthesizer enabled by nonlinear MEMS resonator
- A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization. Micromachines 2021, 12, 82
- Contact-Free MEMS Devices for Reliable and Low-Power Logic Operations
- Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature
- Gas chromatography based on micro electro mechanical systems (MEMS) for in situ molecular analysis of planetary environments
- 10 MHz Length-Extension Mode Quartz MEMS Resonator For Frequency and Time Applications
- MEMS-INS Based Indoor Pedestrian Localization Using Three-Dimensional Map Matching Algorithm
- Dynamic piezoelectric MEMS-based optical metasurfaces
- GaAs-based microelectromechanical terahertz bolometers fabricated on high-resistivity Si substrates using wafer bonding technique
- Development of A Z-Axis Out of Plane MEMS Accelerometer
- Controllable multichannel acousto-optic modulator and frequency synthesizer enabled by nonlinear MEMS resonator
- Functionality Evaluation of Micro Electro Mechanical Systems Sensor for Varied Selective Functionalization Thickness to Determine Creatinine Concentration
- Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning
- Fast-response MEMS xylene gas sensor based on CuO/WO3 hierarchical structure
- Photonic crystal MEMS emitter for chemical gas sensing
- Manufacturing and Testing of Radio Frequency MEMS Switches Using the Complementary Metal Oxide Semiconductor Process
- Application of the MEMS Accelerometer as the Position Sensor in Linear Electrohydraulic Drive
- Evaluation of a Micro-Electro Mechanical Systems Spectral Sensor for Soil Properties Estimation
- Evaluation of Microelectromechanical System Gyroscope and Accelerometer in the Object Orientation System Using Complementary Filter
- Nonvolatile bistable memory and Ising machine based on Micro-Electro-Mechanical Systems
- Neurodynamic approximation-based quantized control with improved transient performances for microelectromechanical system gyroscopes: Theory
- Review on challenges in MEMS technology
- A MEMS Optical Phased Array Based on Pitch Tunable Silicon Micromirrors for LiDAR Scanners
- Deformation Behavior of Various Interconnection Structures Using Fine Pitch Microelectromechanical Systems (MEMS) Vertical Probe
- Integration of Gold Nanoparticle–Carbon Nanotube Composite for Enhanced Contact Lifetime of Microelectromechanical Switches with Very Low Contact Resistance
- Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies
- Analysis of dynamic pull-in voltage and response time for a micro-electro-mechanical oscillator made of power-law materials
- Editorial for the Special Issue on Biosensors and MEMS-Based Diagnostic Applications
- Design and simulation of capacitive MEMS switch for Ka band application
- Analysis of Distortion Based on 2D MEMS Micromirror Scanning Projection System
- Influence of electron transport media on the performance of MEMS-based microbial fuel cell
- Ultra-compact micro-electro-mechanical laser beam scanner for augmented reality applications
- X-Band Miniature Filters Using Lithium Niobate Acoustic Resonators and Bandwidth Widening Technique
- MEMS based Geophones and Seismometers
- Weak Radio-Frequency Signal Detection Based on Piezo-Opto-Electro-Mechanical System: Architecture Design and Sensitivity Prediction
- Theoretical Modeling of Piezoelectric Cantilever MEMS Loudspeakers
- MEMS based geophones and seismometers
- Fuzzy wavelet neural control with improved prescribed performance for MEMS gyroscope subject to input quantization
- Analysis of a Casimir-driven parametric amplifier with resilience to Casimir pull-in for MEMS single-point magnetic gradiometry
- Power Handling Capability Enhanced RF MEMS Switch Using Modified-Width Cantilevers Structure
- A New Scheme to Enhance/Decrease Sensitivity of a Mems Resonator Using Parametric Modulation
- UTILIZING MECHANICAL ADHESION FORCE AS A HIGH CONTACT FORCE IN A MEMS RELAY
- Demonstration of tantalum as a structural material for MEMS thermal actuators
- Sacrificial layer optimization for RF MEMS switches
- A Transfer Learning Based Unmanned Aerial Vehicle MEMS Inertial Sensors Fault Diagnosis Method
- A Study of Correction to the Point Cloud Distortion Based on MEMS LiDAR System
- Nanopositioning control of an electrostatic MEMS actuator: adaptive terminal sliding mode control approach
- 国際会議報告: The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021)
- Design of Miniaturized Single Bit MEMS Phase Shifter using MEMS Switches
- Coupled electromechanical and electromagnetic simulation of radio frequency microelectromechanical-systems (RF-MEMS) based on compact models approach
- Microfabrication and nanotechnology in manufacturing system–An overview
- Relationship between Thermal Stability and Structure of MEMS Cantilevers Embedded in an Elastomer
- Yaw/Heading optimization by drift elimination on MEMS gyroscope
- The Librator: A new dynamical regime for nonlinear microelectromechanical devices
- Theoretical and experimental analysis of surface roughness and adhesion forces of MEMS surfaces using a novel method for making a compound sputtering target
- Migration of adhesive material in electrostatically actuated MEMS switch
- Sensitive and Low-Power Metal Oxide Gas Sensors with a Low-Cost Microelectromechanical Heater
- Obtaining high SPL piezoelectric MEMS speaker via a rigid-flexible vibration coupling mechanism
- Design and fabrication of an absolute pressure MEMS capacitance vacuum sensor based on silicon bonding technology
- History of Bio-microelectromechanical Systems (BioMEMS)
- Modelling and calculating the stiffness of a cross-shaped element of a microelectromechanical gyroscope-accelerometer
- Experimental Evidence of Mechanical Frequency Comb in a Quad-Mass Mems Structure
- A Bionic MEMS Electronic Stethoscope With Double-Sided Diaphragm Packaging
- A Mems Accelerometer with an Auto-Tuning System Based on an Electrostatic Anti-Spring
- Real-time variable field-of-view scanning of LiDAR by controlling the drive voltage of MEMS micromirror
- Physical Modelling and Identification of Nonlinear Effects in Microelectromechanical Systems
- On the Many Applications of Nanometer-Thin Pure Boron Layers in IC and Microelectromechanical Systems Technology
- Low-Noise High-Precision Readout Circuits for Capacitive MEMS Accelerometer
- Technology evolution from micro-scale energy harvesters to nanogenerators
- Progress in semiconductor diamond photodetectors and MEMS sensors
- A novel MEMS-RIMU self-calibration method based on gravity vector observation
- Intraocular MEMS Capacitive Pressure Sensor
- A Wide Range Frequency Coherent Modulation Control Based on Modal Coupling Effect in MEMS Resonators
- A high-resolution resonant torque sensor based on MEMS quartz resonator
- Ultra-Compact Fourier Transform Near-Infrared MEMS Spectral Sensor for Smart Industry and IoT
- Optimization of Thick Photoresist for Uniform Thickness in RF MEMS Applications
- A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy
- Low-voltage and high-reliability RF MEMS switch with combined electrothermal and electrostatic actuation
- Micromechanical vibro-impact resonator-enabled sensing applications
- Performance Enhancement of Piezoelectric MEMS Energy Harvester Using Split Proof Mass for Powering Ultralow Power Wireless Sensor Nodes
- A New Technique on Vibration Optimization of Industrial Inclinometer for MEMS Accelerometer Without Sensor Fusion
- MEMS, NEMS, AEMS, and Quantum Films for the Next Generation of Computing and Information Technology
- A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes
- MEMS Controlled Contactless Steering and Locking System For E-Vehicles
- Advanced MEMS Technology for Terahertz Frequencies
- Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch
- A MEMS Voice Coil Motor with a 3D Solenoid Coil
- Application of differential evolution to multi-objective tuning of vibration spectrum analyzers based on microelectromechanical systems
- Adaptive Kalman filter for MEMS IMU data fusion using enhanced covariance scaling
- Design of various Coplanar Waveguide RF MEMS Phase Shifters
- Attempt of estimating flow characteristics from wall heat fluxes measured using a three-point micro-electro-mechanical systems sensor
- Ka‐band distributed microelectromechanical systems transmission line phase shifter using metal air metal switch
- High-throughput bend-strengths of ultra-small polysilicon MEMS components
- High-Performance On-Chip Hot-Pressed NdFeB Hard Magnets for MEMS Applications
- Design and Experimental Assessment of Low-Noise Piezoelectric Microelectromechanical Systems Vibration Sensors
- Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone
- Impact of support material deformation in MEMS bulk micromachined diaphragm pressure sensors
- Regulation of nanocrystals structure for high-performance magnetic triboelectric nanogenerator
- Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope
- A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
- Perspectives on C-MEMS and C-NEMS biotech applications
- Silicon nanostructure-based photonic MEMS sensor for biosensing application
- A Novel Multifunctional electronic calibration kit integrated by MEMS SPDT switches
- Impact of Die Attach Sample Preparation on Its Measured Mechanical Properties for MEMS Sensor Applications
- Optimized actuation of resonant MEMS mirror for laser beam scanning application
- Si-based MEMS resonant sensor: A review from microfabrication perspective
- Convex Synthesis of SNI Controllers Based on Frequency-Domain Data: MEMS Nanopositioner Example
- Autonomous shock sensing using bi-stable triboelectric generators and MEMS electrostatic levitation actuators
- Laser Soldering Properties of MEMS Probe for Semiconductor Water Testing
- A simple frequency formulation for the tangent oscillator
- Micro Gas Chromatographic Columns with Metal-Organic Frameworks as Stationary Phase
- Spray-coated electret materials with enhanced stability in a harsh environment for an MEMS energy harvesting device
- Path tracking control of electromechanical micro-positioner by considering control effort of the system
- Dosimetry with gafchromic films based on a new micro-opto-electro-mechanical system
- Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS …
- Research and calculation of dynamic characteristics of a microelectromechanical device
- High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment
- Reducing Dynamism in DRAM With Bistable MEMS Switch as Sleep Transistor
- TEM sample preparation using micro-manipulator for in-situ MEMS experiment
- Design and analysis of a MEMS pressure sensor with a bossed membrane and ancillary bi-functional frog arm structure for low pressure measurement
- Compact and low power silicon photonic components based on MEMS
- Guest Editorial Advanced Sensing and Sensor Fusion for Intelligent Transportation Systems
- Autonomous 3D Indoor Localization Based on Crowdsourced Wi-Fi Fingerprinting And MEMS Sensors
- Dynamic MEMS-based optical metasurfaces
- MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets
- Optimized vertical RF-MEMS switch design with a small actuation voltage
- Estimation of the vehicle speed using cross-correlation algorithms and mems wireless sensors
- Sputtered Platinum (Pt) Electrode Development for Lead Zirconate Titanate (PZT) Piezoelectric Microelectromechanical Systems (MEMS) Devices
- Dynamic Thermal Characterization of MEMS Electrothermal Actuators in Air
- … -Sacker boundaries and appearance of quasi-periodicity in nonlinear oscillators: application to 1: 2 internal resonance and frequency combs in MEMS
- Design and Analysis of Thin Micro-Mechanical Suspended Dielectric RF-MEMS Switch for 5G and IoT Applications
- Improved anchor design for flat MEMS structure by suppressing deformation due to buried-oxide stress on silicon-on-insulator wafer
- Novel design of electrostatic micro cantilever for enhanced travel range
- Frequency–amplitude response of superharmonic resonance of second order of electrostatically actuated MEMS cantilever resonators
- Nonlinear analysis of electrostatic micro-electro-mechanical systems resonators subject to delayed proportional–derivative controller
- Research on DOA Estimation Based on Acoustic Energy Flux Detection Using a Single MEMS Vector Hydrophone
- Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope
- Recent advances in the development of the Texas Instruments phase-only microelectromechanical systems (MEMS) spatial light modulator
- Design of Piezoelectric MEMS Bulk Acoustic Wave Mode-Matched Gyroscopes Based on Support Transducer
- Scanning laser vibrometry of the dynamic rundown and out-of-plane vibration for MEMS
- Neural-Network-Based Constrained Output-Feedback Control for MEMS Gyroscopes Considering Scarce Transmission Bandwidth
- A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers. Micromachines 2021, 12, 102
- Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing
- 5 Microelectromechanical Systems
- Silicon MEMS inertial sensors evolution over a quarter century
- Performance enhancement of consumer-grade mems sensors through geometrical redundancy
- A novel adaptive Kalman filter for Euler-angle-based MEMS IMU/magnetometer attitude estimation
- << MEMS-Based PVA/PPy/MIP Polymeric-Nanofiber Sensor Fabricated by LIFT-OFF Process for Detection 2, 4-Dinitrotoluene Vapor
- Micromachined Subterahertz Waveguide-Integrated Phase Shifter Utilizing Supermode Propagation
- Terahertz MEMS metadevices
- Design and optimization of high-performance through hole based MEMS energy harvester using PiezoMUMPs
